Trace moisture analyzer
Classification:
Keyword:
- Performance Specification Table
- Technical parameter table
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- Commodity name: Trace moisture analyzer
- Commodity ID: Puren-B+ H2O
- 副标: Pure<sup>n</sup>-B<sup>+</sup> H<sub>2</sub>O
- Minor component: H2O
- Industry use: Special gas industry,Air separation field,Semiconductor Manufacturing
- Product model: Puren系列
• PPB level measurement accuracy • Absolute measurement (no calibration required) • Real time online measurement • Low cost, maintenance free (no need for regular replacement/maintenance of sensors) • Fast response time • Minimal touch control, data transmission
Performance
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Applicable gases: Most toxic and inactive gases
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Detection range: see the technical parameter table for details
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Lower limit of measurement: see technical parameter table for details
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Sensitivity: ± 0.75% or 1/3LDL
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Accuracy: ± 3% or LDL
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Response speed:<1minute to 90%
Electronic parameters
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Alarm indication: system alarm
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Power supply requirements: 100-240VAC, 50/60Hz
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Power: 40W (MAX)
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User interface: 7-inch LCD display screen
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Signal output: 4-20mA output, RS485 output,
adaptive network, RS-232 serial communication
Air system and conditions
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Working environment temperature: 10 ℃~40 ℃
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Working environment relative humidity: 30% to 80% (without condensate)
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Storage temperature: -10 ℃ -40 ℃
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Pipeline material: 316L stainless steel and Hastelloy, Ra<0.25 μ M
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Leak detection test:<1 × 10-9mbar l/sec
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Inlet pressure: 0.05-0.8MPa
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Maximum flow rate: approximately 1.5slm
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Inlet gas temperature: up to 60 ℃
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Inlet and outlet gas circuit: 1/4VCR male
Other
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Size: 630mm × 210mm × 220mm
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Weight: 10Kg
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Appearance: inclined or vertical panel
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Tested gas and background gas
H2O in N2
H2O in He
H2O in Ar
H2O in H2
H2O in O2
H2O in CO2
H2O in CDA
Measuring range
0-20ppm
0-4ppm
0-9ppm
0-16ppm
0-12ppm
0-25ppm
0-18ppm
Lower limit of measurement
0.6ppb
0.12ppb
0.3ppb
0.4ppb
0.3ppb
1.2ppb
0.6ppb
Sensitivity
0.2ppb
0.04ppb
0.1ppb
0.12ppb
0.1ppb
0.4ppb
0.2ppb
Background Gases
N2、He、Ar、H2、O2、CDA、CO、CO2、COS、Ne、Kr、Xe、SF6、NF3、CF4、C2F6、C3F8、 C4F6、C4F8、Cl2、HCl、HBr
* Note: If Cl2, HCl, and HBr need to be measured, Hastelloy alloy should be used as the gas path material
Intent Message
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