Trace hydrogen fluoride analyzer
Classification:
Keyword:
- Performance Specification Table
- Technical parameter table
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- Commodity name: Trace hydrogen fluoride analyzer
- Commodity ID: Puren-B HF
- 副标: Pure<sup>n</sup>-B HF
- Minor component: HF
- Industry use: Special gas industry
- Product model: Puren系列
• PPB level measurement accuracy • Absolute measurement (no calibration required) • Real time online measurement • Low cost, maintenance free (no need for regular replacement/maintenance of sensors) • Fast response time • Minimal touch control, data transmission
Performance
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Applicable gases: Most toxic and inactive gases
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Detection range: see the technical parameter table for details
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Lower limit of measurement: see technical parameter table for details
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Sensitivity: ± 0.75% or 1/3LDL
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Accuracy: ± 3% or LDL
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Response speed:<1minute to 90%
Electronic parameters
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Alarm indication: system alarm
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Power supply requirements: 100-240VAC, 50/60Hz
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Power: 40W (MAX)
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User interface: 7-inch LCD display screen
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Signal output: 4-20mA output, RS485 output,
adaptive network, RS-232 serial communication
Air system and conditions
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Working environment temperature: 10 ℃~40 ℃
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Working environment relative humidity: 30% to 80% (without condensate)
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Storage temperature: -10 ℃ -40 ℃
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Pipeline material: 316L stainless steel, Ra<0.25 μ M
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Leak detection test:<1 × 10-9mbar l/sec
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Inlet pressure: 0.05-0.8MPa
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Maximum flow rate: approximately 1.5slm
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Inlet gas temperature: up to 60 ℃
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Inlet and outlet gas circuit: 1/4VCR male
Other
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Size: 630mm × 210mm × 220mm
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Weight: 10Kg
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Appearance: inclined or vertical panel
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Tested gas and background gas
HF in N2
HF in He
HF in SF6
HF in NF3
HF in CF4
HF in C2F6
HF in C4F6
HF in C3F8
HF in C4F8
Measuring range
0-5ppm
0-1.3ppm
0-8ppm
0-8ppm
0-6ppm
0-12ppm
0-15ppm
0-12ppm
0-14ppm
Lower limit of measurement
0.4ppb
0.4ppb
1.2ppb
0.6ppb
0.8ppb
1.5ppb
15.0ppb
1.5ppb
1.5ppb
Sensitivity
0.15ppb
0.1ppb
0.4ppb
0.2ppb
0.3ppb
0.5ppb
5.0ppb
0.5ppb
0.5ppb
Intent Message
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